Optimization of a 3D micro-accelerometer based on diamagnetic levitation

Abstract: At the micro-scale, diamagnetic effects are of the same order of magnitude or even stronger than weight. Therefore, micro-magnets can levitate above diamagnetic bodies and move freely in the three dimensions of space. The possibilities and limits of a static and permanent levitating magnet are illustrated for the example of a 3-dimensional micro-accelerometer. Optimization is performed in order to fit most current market. It is shown that this technology fulfils the requirements for medium range and short time response markets.